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ISO International Standard

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

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  • Publication Date: 2020-08-24
  • Ref: ISO 22278:2020
  • stdNumber: 22278
  • Version: 1
  • Edition: 1
  • Pages: 29

$163.84

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